Dr. Özge ZorluSenior Researcher at METU-MEMS Centre Middle East Technical University Electrical and Electronics Engineering Dept. Room DB-03 06800 Ankara TURKEY Tel1 (EEE): +90 312 210 45 46 Tel2 (METU-MEMS): +90 312 210 63 23 Fax : +90 312 210 23 04 e-mail: zorlu@metu.edu.tr

Research Interests:

• MEMS, Power MEMS, Energy Harvesting
• BioMEMS, Microfluidic applications of RF MEMS
• Microfabrication technologies, process development
• Microfabricated /CMOS-compatible sensor design
• Magnetic sensors, pressure sensors, temperature sensors
• Interface electronics for energy harvesters

Education:

PhD, Institute of Microelectronics and Microsystems

Ecole Polytechnique Federale de Lausanne – Lausanne, Switzerland, 2008

Thesis: Orthogonal Fluxgate Type Magnetic Microsensors with Wide Linear Operation Range

Advisor: Dr. Pavel Kejik (Group of Prof. Dr. Radivoje Popovic)

MSc, Electronics Engineering

Middle East Technical University – Ankara, Turkey, 2002

Thesis: A Piezoresistive Pressure and Temperature Sensor Cluster

Advisor: Prof. Dr. Tayfun Akin

BSc, Electrical and Electronics Engineering

Middle East Technical University – Ankara, Turkey, 2000

Patents

1.  E. Erdil, K. Topalli,  O. Zorlu, E. Yildirim, H. Kulah, O. Aydin Civi, “Rotational Phase-Shifting Method using Microfluidic Channels for Reconfigurable Transmitarrays,” in application process.

2.  S. Ardanuç, Ö. Zorlu, H. Külah, T. Akın, “Method of Energy Harvesting Using Built-in Potential Difference of Metal-to-Metal Junctions and Device Thereof,” in application process.

3.  a.   P. Kejik, O. Zorlu, “Orthogonal Fluxgate Magnetic Field Sensor,” EP 1,746,430, January 25, 2007.

3.  b.   P. Kejik, O. Zorlu, “Orthogonal Fluxgate Magnetic Field Sensor,” US 7,834,620, November 16, 2010.

Journals

1.      L. Beker, Ö. Zorlu, and H. Külah, “A parylene coating based room temperature wafer-level attachment method for MEMS integration with zero applied force,” accepted to be published in Sensors and Actuators A, 2013-4. http://dx.doi.org/10.1016/j.sna.2013.08.003.

2.      Ö. Zorlu and H. Külah, “A MEMS Energy Harvester for Generating Energy From Non-Resonant Environmental Vibrations,” Sensors and Actuators A, vol. 202, pp. 124-134, November 2013.

3.      A. Rahimi, Ö. Zorlu, A. Muhtaroğlu, and H. Külah, “An Electromagnetic Energy Harvesting System for Low Frequency Applications with a Passive Interface ASIC in Standard CMOS,” Sensors and Actuators A, vol. 188, pp. 158-166, December 2012.

4.      A. Rahimi, O. Zorlu, A. Muhtaroglu, and H. Kulah, “A Fully Self-Powered Electromagnetic Energy Harvesting System with Highly Efficient Dual Rail Output,” IEEE Sensors Journal, vol. 12(6), pp. 2287-2298, June 2012.

5.      Ö. Zorlu, E. T. Topal, H. Külah, “A vibration-based electromagnetic energy harvester using mechanical frequency up-conversion method,” IEEE Sensors Journal, vol. 11(2), February 2011, pp. 481-488.

6.      O. Zorlu, P. Kejik, W. Teppan, “A closed core microfluxgate sensor with cascaded planar FeNi rings,” Sensors and Actuators A: Physical, Volume 162(2), August 2010, pp. 241-247.

7.      O. Zorlu, P. Kejik, R. S. Popovic, “An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core,” Sensors and Actuators A: Physical, Volume 135(1), March 2007, pp. 43-49.

Conferences

1.      S. Baghaee, H. Ulusan, S. Chamanian, O. Zorlu, H. Kulah, and E. Uysal-Biyikoglu, “Demonstration of Energy-Neutral Operation on a WSN Testbed Using Vibration Energy Harvesting,” European Wireless 2014 (EW2014), Barcelona, Spain, 14-16^th May 2014.

2.      E. Erdil, K. Topalli, N. S. Esmaeilzad, O Zorlu, H. Kulah, and O. Aydin Civi, “A Reconfigurable Nested Ring-Split Ring Transmitarray Unit Cell by Microfluidic Technology,” EUCAP 2014, The 8^th European Conference on Antennas and Propagation, The Hague, The Netherlands, 6-11 April 2014, pp XXX.

3.      S. Chamanian, Ö. Zorlu, H Külah, and A. Muhtaroğlu, “A self-powered integrated interface circuit for low power piezoelectric energy harvesters,” International Conference on Energy Aware Computing, ICEAC 2013, Istanbul, Turkey, 16-18^thDecember 2013.

4.      H. Uluşan, Ö. Zorlu, H Külah, and A. Muhtaroğlu, “A 180 nm Self-Powered Rectifier Circuit for Electromagnetic Energy Harvesters,” International Conference on Energy Aware Computing, ICEAC 2013, Istanbul, Turkey, 16-18^thDecember 2013. (pdf)

5.      S. Baghaee, H. Uluşan, S. Chamanian, Ö. Zorlu, H. Külah, and E. Uysal-Biyikoglu, “Towards a Vibration Energy Harvesting WSN Demonstration Testbed,” TIWDC 2013, The 24^th Tyrrhenian International Workshop on Digital Communications, 23^rd-25^th September 2013, Genoa, Italy.

6.      A. Koyuncuoğlu, Ö. Zorlu, T. Okutucu Özyurt, and H. Külah, “Hybrid energy harvester using piezoelectric and pyroelectric properties of PZT-5A ceramics,” 11^th International Energy Conversion Engineering Conference, IECEC 2013, 14-17^th July, San Jose, CA, USA.

7.      E. Erdil, K. Topalli, O. Zorlu, T. Toral, E. Yildirim, H. Kulah, O. Aydin Civi, “Reconfigurable Microfluidic Transmitarray Unit Cells,” MEMSWAVE 2013, 14^th International Symposium on RF-MEMS and RF-Microsystems, Potsdam, Germany, 1-3 July 2013, pp. XX-XX.

8.      L. Beker, Ö. Zorlu, N. Goksu, and H Külah, “Stimulating Auditory Nerve with MEMS Harvesters for Fully Implantable and Self-Powered Cochlear Implant,” International Conference on Solid-State Sensors, Actuators, and Microsystems, Transducers’13, Barcelona, Spain, 16-20 June, 2013. Received the “Outstanding Oral Presentation Award.”

9.      H. Ulusan, K. Gharehbaghi, O. Zorlu, A. Muhtaroglu, and H Külah, “An Efficient Integrated Interface Electronics for Electromagnetic Energy Harvesting from Low Voltage Sources,” International Conference on Solid-State Sensors, Actuators, and Microsystems, Transducers’13, Barcelona, Spain, 16-20 June, 2013.

10.   E. Erdil, K. Topalli, O. Zorlu, T. Toral, E. Yildirim, H. Kulah, O. Aydin Civi, “ A Reconfigurable Microfluidic Transmitarray Unit Cell,” EUCAP 2013, The 7^th European Conference on Antennas and Propagation, Gotheburg, Sweden, 8-12 April 2013, pp. 2957-2960.

11.   L. Beker, Ö. Zorlu, and H. Külah, “A Room Temperature, Zero Force, Wafer-Level Attachment Method for MEMS Integration,” MEMS’13:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, Taipei, Taiwan, 20-24^th January 2013, pp: 267-270.

12.   Ö. Zorlu, S. Türkyılmaz, A. Muhtaroğlu, and H. Külah, “An Electromagnetic Energy Harvester for Low Frequency and Low-g Vibrations with a Modified Frequency Up Conversion Method,” MEMS’13:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, Taipei, Taiwan, 20-24^th January 2013, pp: 805-808.

13.   H. Uluşan, K. Gharehbaghi, Ö. Zorlu, A. Muhtaroğlu, H. Külah, “A Self-Powered Rectifier Circuit for Low-Voltage Energy Harvesting Applications,” International Conference on Energy Aware Computing, ICEAC 2012, METU NCC, Cyprus, 3-5^thDecember 2012.

14.   K. Gharehbaghi, H. Uluşan, Ö. Zorlu, A. Muhtaroğlu, H. Külah, “A Fully Integrated Power Management Circuit for Electromagnetic Energy Harvesting Applications,” International Conference on Energy Aware Computing, ICEAC 2012, METU NCC, Cyprus, 3-5^thDecember 2012.

15.   Ö. Zorlu, and H. Külah, “A miniature and non-resonant vibration-based energy harvester structure”, Eurosensors XXVI, Procedia Engineering, 9-12^th September 2012, Krakow, Poland, pp. 664-667.

16.   L. Beker, Ö. Zorlu, H. Külah, A. Muhtaroğlu, “Hybrid Energy Harvesting From Keyboard,” International Conference on Energy Aware Computing, ICEAC 2011 İstanbul, Turkey, 30^thNovember – 2^ndDecember 2011.

17.   E. T. Topal, Ö. Zorlu, H. Külah, A. Muhtaroğlu, “A Cr-Ni Thermoelectric MEMS Energy Harvester for Low Profile Applications,” International Conference on Energy Aware Computing, ICEAC 2011 İstanbul, Turkey, 30^thNovember – 2^ndDecember 2011.

18.   S. Türkyılmaz, Ö. Zorlu, H. Külah, A. Muhtaroğlu, “An Electromagnetic Micro-Power Generator for Low Frequency Vibrations with Tunable Resonance,” Eurosensors XXV, Procedia Engineering 25, 4-7^th September 2011, Athens, Greece, pp. 729-732.

19.   A. Rahimi, Ö. Zorlu, A. Muhtaroğlu, H. Külah, “A Compact Electromagnetic Vibration Harvesting System with High Performance Interface Electronics,” Eurosensors XXV, Procedia Engineering 25, 4-7^th September 2011, Athens, Greece, pp. 215-218.

20.   A. Rahimi, O. Zorlu, H. Kulah, A. Muhtaroğlu, “A vibration-based electromagnetic energy harvester system with highly efficient interface electronics,” 16^th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS’11, Beijing, China, 5-9^th June 2011, pp. 2650-2653.

21.   A. Rahimi, O. Zorlu, H. Kulah, A. Muhtaroglu, “An interface circuit prototype for a vibration-based electromagnetic energy harvester,” International Conference on Energy Aware Computing, ICEAC 2010 Cairo, Egypt, 16-18^th December 2010.

22.   Ö. Zorlu, E. T. Topal, H. Külah, “A mechanical frequency up-conversion mechanism for vibration based energy harvesters,” Proceedings of IEEE Sensors’09, Christchurch, New Zealand, 25-28^th October 2009, pp. 1366-1369.

23.   O. Zorlu, P. Kejik, W. Teppan, “Micro fluxgate sensor with cascaded planar ring cores,” Eurosensors XXIII, Procedia Chemistry, Lausanne, Switzerland, 6-9^th September 2009, pp. 630-633.

24.   O. Zorlu, P. Kejik, R. S. Popovic, “Investigation of Giant-Magneto-Impedance (GMI) Effect and Magnetic Hysteresis in Microfabricated Permalloy/Copper Device,” Transducers and Eurosensors’07: 4^th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, 10-14^th June 2007, pp: 2577-2580.

25.   O. Zorlu, P. Kejik, R. S. Popovic, “Fluxgate-Type Magnetic Microsensors For Wide Linear Measuring Range,” Sensors and Applications Symposium (SAS’07), San Diego CA, USA, 6-8^th February 2007.

26.   O. Zorlu, P. Kejik, F. Vincent, R. S. Popovic, “An orthogonal fluxgate-type magnetic microsensor,” MEMS’06:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 22-26^th January 2006, pp: 646-649.

27.   O. Zorlu, P. Kejik, F. Vincent, R. S. Popovic, “A novel planar magnetic sensor based on orthogonal fluxgate principle,” Proceedings of the IEEE PRIME’05 Conf. Lausanne, Switzerland, July 2005, pp: 215-218 (Awarded by the “Gold Leaf” award, given to 10 papers out of 111)

National Conferences

1.      A. Koyuncuoğlu, Ö. Zorlu, T. Okutucu-Özyurt, H. Külah, “Piezoelektrik ve Piroelektrik Özellikli Malzemelerle Melez Enerji Harmanlayıcı Tasarımı,” 19. Ulusal Isı Bilimi ve Tekniği Kongresi Bildiriler Kitabı, pp. 1390-1394, Samsun, Türkiye, 09-12 Eylül 2013.